COXEM EM-30PLUS - 5.2 Acceleration Voltage Settings

Scanning Electron Microscope EM-30PLUS Operating Manual
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5.2 Setting Acceleration Voltage
5.2.1 Summary of Acceleration Voltage
Acceleration voltage refers to energy intensity of Electron Beams, select the proper value
depending on the purpose of specimen observation.
The advantages and disadvantages according to the intensity of acceleration voltage are as
follows.
Acceleration
voltage(Acc)
Advantages
Disadvantages
High
acceleration
voltage
 Resolution
increases
 It is impossible to observe
surface information
 Edge Effect gets intensified
 Charge Up phenomenon is
serious
 Specimen is damaged
severely
Low
acceleration
voltage
 It is possible to
observe surface
information
 Edge Effect
decreases
 Charge Up
phenomenon
decreases
 Damage on
specimen is little
 Resolution decreases
 Brightness decreases
 Signal decreases