Scanning Electron Microscope EM-30PLUS Operating Manual
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2.9.2 Wobble ........................................................................................................................................................... 39
3. Specimen Preparation .............................................................................................. 40
3.1 Summary ..................................................................................................................................... 40
3.2 Types of Stub .............................................................................................................................. 41
3.2.1 Basic Components of Stub .................................................................................................................... 41
3.2.2 Directions for Multi Holder ................................................................................................................... 42
3.2.3 Stub Cleaning .............................................................................................................................................. 43
3.3 Types of Materials ..................................................................................................................... 44
3.3.1 Classification by Height .......................................................................................................................... 44
3.3.2 Classification by Material ....................................................................................................................... 44
3.4 Production of Specimen ........................................................................................................... 46
3.4.1 Checklist before Specimen Preparation .......................................................................................... 46
3.4.2 Material Preparation ................................................................................................................................. 46
3.4.3 Measurement of WD ................................................................................................................................ 48
3.4.4 Specimen Mounting on Stub ............................................................................................................... 49
3.5 Specimen Mounting .................................................................................................................. 51
3.5.1 Preparation and Mounting of Specimen ........................................................................................ 51
3.5.2 Specimen Storage ...................................................................................................................................... 53
4 Preparation for Taking Photos ............................................................................... 54
4.1 Power ON/OFF ............................................................................................................................ 54
4.1.1 Turning on the Main Body of EM-30PLUS ..................................................................................... 54
4.1.2 Turning off EM-30PLUS ........................................................................................................................... 55
4.2 Setting up of Electron Beam ................................................................................................... 56
4.2.1 Turning on the Electron Beam ............................................................................................................. 56
4.2.2 Filament Optimization ............................................................................................................................. 57
4.3 Location Movement of Specimen ........................................................................................... 59
4.3.1 Use of Multi Holder .................................................................................................................................. 59
4.3.2 Use of Stub Except Multi Holder ........................................................................................................ 60
4.3.3 Use of Tilt Function................................................................................................................................... 62
4.3.4 Adjustment of Minimum Magnification .......................................................................................... 64
4.3.5 Specimen Selection and Moving using Mouse ........................................................................... 65
4.3.6 Driving Mode ............................................................................................................................................... 66
5 Image Acquisition ..................................................................................................... 69
5.1 Setting Observation Mode ....................................................................................................... 70
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