COXEM EM-30PLUS

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Scanning Electron Microscope EM-30PLUS Operating Manual

8 Alignment Operation .............................................................................................. 121

8.1 Summary of E-Gun Alignment ............................................................................................. 121

8.2 Method for E-Gun Alignment .............................................................................................. 122

Main Page

Table of Contents2
Introduction7
Descriptions on Product Parts7
Main Body of EM-30PLUS7
Back and Inside of EM-30PLUS8
Operational Procedure of Equipment9
Cautions before Use10
Handling10
Permission by Operation11
Safety Precautions12
Screen Composition14
Main Screen of NS14
Explanations on Buttons15
E-Gun Power Button15
Vacuum State Buttons16
Selection of Detector Mode17
Display Mode18
Image Mode20
Stage & Holder Information20
Maximum Tilt Angle21
Right Function Tap22
Function22
Magnification23
Image Viewer Setting24
Top Function Tap25
Setup26
Help36
Image Viewing37
Screen for Image Viewing37
Image Tools37
Image Correction38
Image Shift38
Other Buttons39
Delete All39
Wobble39
Specimen Preparation40
Summary40
Types of Stub41
Basic Components of Stub41
Directions for Multi Holder42
Stub Cleaning43
Types of Materials44
Classification by Height44
Classification by Material44
Production of Specimen46
Checklist before Specimen Preparation46
Material Preparation46
Measurement of WD48
Specimen Mounting on Stub49
Specimen Mounting51
Preparation and Mounting of Specimen51
Specimen Storage53
Preparation for Taking Photos54
Power ON/OFF54
Turning on the Main Body of EM-30PLUS54
Turning off EM-30PLUS55
Setting up of Electron Beam56
Turning on the Electron Beam56
Filament Optimization57
Location Movement of Specimen59
Use of Multi Holder59
Use of Stub Except Multi Holder60
Use of Tilt Function62
Adjustment of Minimum Magnification64
Specimen Selection and Moving Using Mouse65
Driving Mode66
Image Acquisition69
Setting Observation Mode70
RED & Focus Mode70
Fast Mode70
Slow Mode71
Photo Mode71
Setting Acceleration Voltage72
Summary of Acceleration Voltage72
Setting Acceleration Voltage76
Setting Observation Magnification/Spot Size78
Methods for Magnification Selection79
Setting Spot Size80
Focus Adjustment81
Focus Setting83
Fine Movement of Images89
Use of Image Shift89
Use of Beam Rotation90
Control of Contrast and Brightness91
Control of Contrast/Brightness91
BSE Mode92
Precautions for Using BSE Sensor93
BSE Setting94
Directions for BSE Mode94
5.8 LV Mode (Low Vacuum Mode) - Optional98
Wobble Operation for Aperture100
Structure of Aperture100
Wobble (Procedure of Aperture Alignment)101
Wobble Operation 1102
Wobble Operation 2106
Methods for Aperture Setting110
Aperture Alignment (Resetting)112
Image Save113
Management of Image Information113
Use of Image Tools114
Addition of Figures114
Image Save Function120
Image Save120

COXEM EM-30PLUS - Page 5

Table of Contents