Inficon XTC/3 User Manual

5 - 25
XTC/3 Operating Manual
5.2.2.4.4 Standard Update General Parameters
Command:
UG <Command ID> <Parameter Value>
Command ID = <Byte> See “UG Command ID” column of Table 5-3.
Parameter Value = <Integer> | <Float>
Integer = 4 byte, low to high
Float = 4 byte, ANSII standard, single precision, low to high
Description: Type of parameter value depends on command ID, see
“DataType” column of Table 5-3.
Response:
None (Just header and trailer)
Special Case: UG255<List of all General Parameter Values in order> will
update all general parameters in numeric order.
NOTE: Some limitations may apply as to when general parameters
may be updated.
Table 5-3 Standard general parameters
UG
(0x5547)
Command ID
Name Units / Allowed
Values / Notes
Data
Type /
Format
Low
Limit
High
Limit
0
(0x00)
1
Process to run
(XTC/3M only)
Can be changed
only in Ready or Idle
in last layer
Int
199
1
Film to run
(XTC/3S only)
19
1
(0x01)
Start Layer Without
Backup Xtal
1 = Yes, 0 = No Int 0 1
2 (0x02) Stop on Alarms 1 = Yes, 0 = No Int 0 1
3 (0x03) Stop On Max Power 1 = Yes, 0 = No Int 0 1
4
(0x04)
1
Dep/Etch Mode 0 = Deposit
1 = Etch
Int 0 1
5 (0x05)
1
Test 1 = Yes, 0 = No Int 0 1
6
(0x06)
1
Sensor 1 Type 0 = Single
1 = CrystalTwo
2 = CrystalSix
3 = Crystal12
4 = Rotary
5 = Dual Head
Int 0 5

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English