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XTC/3 Operating Manual
1.4.3 Process Recipe Storage
1.4.3.1 Film Parameters
Pre/Post Deposit
Power Ramps. . . . . . . . . . . . . . . . . . 2 per film
Power Level . . . . . . . . . . . . . . . . 0.0 to 100%
Rise Time . . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
Soak Time . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
Idle Ramps . . . . . . . . . . . . . . . . . . . . 1 per film
Idle Power . . . . . . . . . . . . . . . . . 0.0 to 100.0%
Idle Ramp Time . . . . . . . . . . . . . 00:00 to 99:59 min:s
Deposit
Deposition Rate . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s (display shows three digits)
Final Thickness . . . . . . . . . . . . . . . . 0.0 to 999.9 kÅ
Thickness Set Point . . . . . . . . . . . . . 0.0 to 999.9 kÅ
Rate Ramp . . . . . . . . . . . . . . . . . . . . 1 per film
New Rate . . . . . . . . . . . . . . . . . . 0.0 to 999.9 Å/s (display shows three digits)
Ramp Time . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
RateWatcher
®
. . . . . . . . . . . . . . . . . Sample and Hold Feature
RateWatch Accuracy . . . . . . . . . 1 to 99%
RateWatch Hold . . . . . . . . . . . . . 00:00 to 99:59 min:s
Sensor
Sensor #. . . . . . . . . . . . . . . . . . . . . . 1 or 2
Tooling . . . . . . . . . . . . . . . . . . . . . . . 10.0 to 500.0%
Second Tooling . . . . . . . . . . . . . . . . 10.0 to 500.0%
Crystal Stability, Single . . . . . . . . . . . 0, 25 to 9999 Hz (1 to 24 are excluded)
XTC/3M XTC/3S
Process Programs 99 1
Film Programs 32 9
Process Layers 999
per
process
1
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