Inficon XTC/3 User Manual

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XTC/3 Operating Manual
6.5.1 Diagnostic Procedures
The following diagnostic procedures employ the Crystal Sensor Emulator to
analyze a constant Crystal Fail message. The symptom is a Crystal Fail message
that is displayed by the Deposition Controller even after the monitor crystal has
been replaced with a new “good” monitor crystal.
6.5.1.1 Measurement System Diagnostic Procedure
1 Refer to Figure 6-10 on page 6-25. Remove the 6 in. BNC cable from the
Feed-Through at point A.
2 Connect the Crystal Sensor Emulator to the 6 in. BNC cable at Point A.
 If the XTAL Fail message disappears after approximately five seconds, the
measurement system is working properly. Re-install the 6 in. BNC cable to
the Feed-Through. Go to section 6.5.1.2.
 If the XTAL Fail message remains, continue at step 3.
3 Disconnect the 6 in. BNC cable from the Oscillator and from the Emulator.
4 Visually inspect the 6 in. BNC cable to verify that the center pins are seated
properly.
5 Use an Ohm meter to verify the electrical connections on the 6 in. BNC cable.
 There must be continuity (<0.2 Ω) between the center pins.
 There must be isolation (>10 MΩ) between the center pins and the
connector shield.
 There must be continuity between the connector shields.
Replace the 6 in. BNC cable if it is found to be defective and repeat Step 2 of
this procedure.
6 If the 6 in. BNC cable is not defective, re-connect the 6 in. cable to the oscillator
and to the Crystal Sensor Emulator. If the XTAL Fail message remains, contact
INFICON (refer to section 1.3 on page 1-5).

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English