Inficon XTC/3 User Manual

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XTC/3 Operating Manual
3.4 Executing a Process
Once a process has been defined as described in Chapter 4, it is ready to execute.
 START, pressed once, will start or continue the process from the point
at which it was stopped.
 STOP freezes a process, the status information on the display is maintained
and the control voltage output is set to zero.
 RESET, if pressed when XTC/3 is in Stop, takes a process back to
the first layer.
HINT: It may be desirable to execute a new process in TEST (enabled in Process
sub-screen of the General Parameter display, see section 4.4.1 on page
4-19) before doing an actual deposition to check correct shutter operation,
sequencing and limits.
The execution of a process is depicted in the following state diagram. (See Figure
3-12 and Figure 3-13.)
Figure 3-12 Symbols used in flow charts
Solid lines indicate the automatic sequence of steps.
Dotted lines indicate steps the user may select.

Inficon XTC/3 Specifications

General

Brand	Inficon
Model	XTC/3
Category	Controller
Language	English