3 - 14
XTC/3 Operating Manual
3.4 Executing a Process
Once a process has been defined as described in Chapter 4, it is ready to execute.
START, pressed once, will start or continue the process from the point
at which it was stopped.
STOP freezes a process, the status information on the display is maintained
and the control voltage output is set to zero.
RESET, if pressed when XTC/3 is in Stop, takes a process back to
the first layer.
HINT: It may be desirable to execute a new process in TEST (enabled in Process
sub-screen of the General Parameter display, see section 4.4.1 on page
4-19) before doing an actual deposition to check correct shutter operation,
sequencing and limits.
The execution of a process is depicted in the following state diagram. (See Figure
3-12 and Figure 3-13.)
Figure 3-12 Symbols used in flow charts
Solid lines indicate the automatic sequence of steps.
Dotted lines indicate steps the user may select.
To Next Page
Loading...
