XRF-2000 Series Operating Manual
5
4.9.2 2D(Point). ............................................................................... 47
4.9.3 3D(Scan). ............................................................................... 48
4.9.4 3D(Point) ................................................................................ 48
4.10 Random Stage. .............................................................................. 49
4.11 Set Measuring Unit. ........................................................................ 49
4.12 Set Decimal Point. .......................................................................... 50
4.13 Cal File Select Window .................................................................. 50
4.14 Recalibration Window ..................................................................... 51
4.15 New Calibration .............................................................................. 52
4.15.1 Thickness Calibration. .......................................................... 52
4.15.2 Quantitative Calibration ........................................................ 56
4.15.3 Plating bath Calibration ........................................................ 62
4.16 System Adjustment Window ........................................................... 67
4.17 Focus Laser ................................................................................... 68
4.18 Lamp .............................................................................................. 68
4.19 Set Y Stage Auto Move .................................................................. 68
4.20 Auto Cycle Measurement ............................................................... 68
4.21 Auto Cycle Number ........................................................................ 68
5. How To Measure ...................................................................................... 68
5.1 Loading Sample ............................................................................... 68
5.2 Adjust Focus. ................................................................................... 68
5.3 Select Cal File and Click Start Button. .............................................. 68
6. Maintenance ............................................................................................. 69
7. Troubleshooting ...................................................................................... 69
Appendix
A. X-RAY FLUORESCENCE (XRF) ............................................................. 71
B. New Calibration for Disk ........................................................................ 73
C. New calibration for RoHS ...................................................................... 80
D. Calibration for CSFP .............................................................................. 85
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