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MKS 640A/641A
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116669-P1
Rev C, 12/99
Instruction Manual
MKS Type 640A/641A
Pressure Controller
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com

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