MKS 640A/641A - Appendix C: Gas Density Table

Appendix C: Gas Density Table
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Appendix C: Gas Density Table
GAS SYMBOL DENSITY
g/l @ 0
o
C
Air
Ammonia
- - -
NH
3
1.293
0.760
Argon
Arsine
Boron Trichloride
Bromine
Ar
AsH
3
BCl
3
Br
2
1.782
3.478
5.227
7.130
Carbon Dioxide
Carbon Monoxide
Carbon Tetrachloride
Carbon Tetraflouride
(Freon - 14)
Chlorine
CO
2
CO
CCl
4
CF
4
Cl
2
1.964
1.250
6.86
3.926
3.163
Chlorodifluoromethane
(Freon - 22)
Chloropentafluoroethan
e
(Freon - 115)
Chlorotrifluoromethane
(Freon - 13)
Cyanogen
Deuterium
CHClF
2
C
2
ClF
5
CClF
3
C
2
N
2
D
2
3.858
6.892
4.660
2.322
0.1799
Diborane
Dibromodifluoromethan
e
B
2
H
6
CBr
2
F
2
1.235
9.362
Dichlorodifluoromethan
e
(Freon - 12)
Dichlorofluoromethane
(Freon - 21)
Dichloromethysilane
CCl
2
F
2
CHCl
2
F
(CH
3
)
2
SiC
l
2
5.395
4.592
5.758
(Table continued on next page)