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MKS 640A/641A - Table 12: Pressure Range Selection; Table 13: Fitting Type Selection

MKS 640A/641A
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Model Code Description A
pp
endix D: Model Code Ex
p
lanation
68
Pressure Range (XXX)
The transducer enclosed in the 640 Series controller, is available in five standard full scale
ranges. The full scale pressure is defined by a two number one letter designation.
Pressure Range Selection
Full Scale Pressure Order Code
10 Torr 11T
100 Torr 12T
1000 Torr 13T
60 psia 61P
100 psia 12P
Table 12: Pressure Range Selection
Fitting Number (Y)
The 640 Series controller has a range of fitting options, selected by a single letter code.
Fitting Type Selection
Fitting Choice Order Code
Cajon 4-VCR, male W
Cajon 8-VCR, male T
¼” Swagelok S
Counter bore C-seal (SEMI 2787.1) C
Counter bore C-seal (0.445 inch diameter) D
Fujikin W-seal* (SEMI 2787.3) F
Unit Z-seal*(SEMI 2787.2) U
* Consult factory for availability
Table 13: Fitting Type Selection

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