MKS 640A/641A - Appendix A: Product Specifications; Performance Specifications

Appendix A: Product Specifications Performance S
p
ecifications
53
Appendix A: Product Specifications
All specifications are at 23° C, 120 VAC
Performance Specifications
Accuracy
1
±
0.5% Reading
CE Compliance
Electromagnetic Compatibility
2
EMC Directive 89/336/EEC
Control Range 2.0 to 100% F.S.
Control Repeatability
±
0.1% F.S.
Proportional Term 8 positions
(0 through 7; positions 8 and 9 repeat settings 0 and 1)
Integral Term 10 positions (0 through 9)
Leak Integrity
Internal to external
Through closed
metal
valve
Through closed Kel-F valve
Through closed
elastomer
valve
<10
-9
scc/sec He
<1% F.S. or 1 sccm (with 1 ATM
∆
P N
2
), whichever is
greater
<0.5% F.S. (with 1 ATM
∆
P N
2
)
1 x 10
-4
scc/sec He
Maximum Operating Differential
Pressure
3
Valve orifices sizes A through 4
Valve orifice sizes 5 and 6
150 psid
≤
30 psid
Temperature Coefficient
Zero
±
Span
±
±
0.02% F.S./
°
C
±
0.04% Reading/
°
C
1
Pressure output signal includes controller error, linearity, hysteresis, and repeatability.
2
An overall metal braided shielded cable, properly grounded at both ends, is required during use.
3
Consistent with the overpressure limit of the transducer within the 640 Series controller.