Table of Contents
iii
Table of Contents
Pressure Transducer Safety Information.................................................................................. 1
Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Safety Procedures and Precautions............................................................................. 3
Chapter One: General Information......................................................................................... 5
Introduction............................................................................................................... 5
How This Manual is Organized.................................................................................. 6
Manual Conventions ..................................................................................... 6
Customer Support...................................................................................................... 7
Chapter Two: Installation......................................................................................................9
How To Unpack the 640 Series Controller................................................................. 9
Unpacking Checklist ..................................................................................... 9
Product Location and Requirements........................................................................... 10
Interface Cables ......................................................................................................... 11
Generic Shielded Cable Description .............................................................. 12
The I/O Connector..................................................................................................... 13
Gas Pressure and Control........................................................................................... 15
Pressure Limits.............................................................................................. 15
Installing the Unit.......................................................................................... 15
Dimensions................................................................................................................ 17
Side Port Version.......................................................................................... 17
Down Port Version........................................................................................ 19
Side Port Controller Mounting Instructions................................................................ 21
Fittings.......................................................................................................... 21
Mounting Hardware ...................................................................................... 21
Down Port Controller Mounting Instructions ............................................................. 22
How To Connect the C-Seal Fittings ............................................................. 23
How To Connect the W-Seal (SEMI 2878.3) Fittings.................................... 26
How To Connect the Z-Seal (SEMI 2878.2) Fittings ..................................... 28
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