MKS 640A/641A - Down Port Controller Mounting Instructions; Table 4: SEMI Specifications for down Port Fitting Options

Down Port Controller Mounting Instructions Cha
p
ter Two: Installation
22
Down Port Controller Mounting Instructions
Refer to SEMI specification 2787.x for specific information on each fitting, as shown in Table 5.
SEMI Specifications for Down Port Fitting Options
Fitting Model Code
Designation
SEMI
Specification
C-Seal C 2787.1
C-Seal (0.445 inch diameter) D

W-Seal* F 2787.3
Z-Seal* U 2787.2
* Consult factory for availability

No SEMI Specification applies
Table 5: SEMI Specifications for Down Port Fitting Options
Caution
1. Handle the 640 Down Port Controller with extreme care. Be
especially careful when placing the 640 Down Port Controller
upright on a surface. Any scratches, dings, or dents on the bottom
surface of the controller will cause improper sealing and may
create a leak.
2. Do not remove the four (4) screws on the end of the controller.
The internal seals are designed for one use only. The fitting
surface may not remain flat if the screws are loosened.