MKS 640A/641A - Figure 5: Bottom View of the down Port 640; Figure 6: Bottom View of the down Port Seals

Dimensions Cha
p
ter Two: Installation
20
3.622+0.015
(92+
0.38)
0.591+
0.005
(15+
0.12)
1.181+
0.00
5
(30+0.12)
4.14+
0.02
(
105.0+0.5
)
Figure 7: Bottom View of the Down Port 640
C-Seal
(
SEMI 2787.1
)
C-Seal
(
0.445 in. diameter
)
0.300 dia x 0.024 dp.
(
7.62 x 0.610 dp
)
0.221 dia.
(
5.61
)
0.445 dia. x 0.020 dp
(
11.3 x 0.508 dp
)
0.221 dia.
(
5.61
)
V-Seal
(
SEMI 2787.3
)
Z-Seal
(
SEMI 2787.2
)
0.221 dia.
(
5.61
)
0.196 dia.
(
4.98
)
Figure 8: Bottom View of the Down Port Seals