MKS 640A/641A - Page 78

Appendix C: Gas Density Table
65
GAS SYMBOL DENSITY
g/l @ 0
o
C
Hydrogen Chloride
Hydrogen Fluoride
Isobutylene
Krypton
Methane
HCl
HF
C
4
H
8
Kr
CH
4
1.627
0.893
2.503
3.739
0.715
Methyl Fluoride
Molybdenum Hexafluoride
Neon
Nitric Oxide
Nitrogen
CH
3
F
MoF
6
Ne
NO
N
2
1.518
9.366
0.900
1.339
1.250
Nitrogen Dioxide
Nitrogen Trifluoride
Nitrous Oxide
Octafluorocyclobutane
(Freon - C318)
Oxygen
NO
2
NF
3
N
2
O
C
4
F
8
O
2
2.052
3.168
1.964
8.937
1.427
Pentane
Perfluoropropane
Phosgene
Phosphine
Propane
C
5
H
12
C
3
F
8
COCl
2
PH
3
C
3
H
8
3.219
8.388
4.418
1.517
1.967
Propylene
Silane
Silicon Tetrachloride
Silicon Tetrafluoride
Sulfur Dioxide
C
3
H
6
SiH
4
SiCl
4
SiF
4
SO
2
1.877
1.433
7.580
4.643
2.858
(Table continued on next page)