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MKS 640A/641A - Page 8

MKS 640A/641A
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Table of Contents
v
General Information................................................................................................... 57
Checking the Orifice Size.............................................................................. 57
How To Verify the Orifice Selection.......................................................................... 58
Using Different Gases ................................................................................... 60
Appendix C: Gas Density Table............................................................................................ 63
Appendix D: Model Code Explanation.................................................................................. 67
Model Code Description............................................................................................ 67
Index...................................................................................................................................... 73

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