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MKS 640A/641A - Page 87

MKS 640A/641A
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Index
74
Pressure output range, 13, 50
Pressure range, 5, 68
Pressure, inlet, 15
Process control, 31, 3537
Proportional control, 31, 36, 45
R
Returning the product, 7, 9
S
Seal material, 69
Set point, 13
Set point input, 14, 31, 36
Set point recognition, 40
Span adjustment, 45
Specifications
environmental, 54
performance, 53
physical, 55
trip points, 54
T
Temperature, 10
Test jacks, 20, 46
Transducer board, 47
Trip point action, 47
Trip point values, 46
Trip points, 5, 13, 14, 20, 31, 41, 70
Tuning, 3639
U
Upstream control, 16, 51
V
Valve commands, 40
Valve orifice, 5762, 70
Valve plug material, 71
Valve seal material, 5
Valve type, 69
Z
Zero, 4344

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