Newport LBP2 Series - Page 92

LBP2 User Guide Document No: 50306-001 Rev G 3/12/2020 Page 92
eccentricity:
x
yx
d
dd
ze


22
)(


40
i
A

(z)
effective
irradiation area
x
3.2.7
Irradiation area at location z
for which the power/energy
density exceeds the
threshold density.
41
E

(z)
H

(z)
effective avg.
power/energy
density
x
3.2.8
Spatially averaged
power/energy density of the
distribution at location z,
defined as the weighted
mean.
effective average power:
i
A
P
zE



)(
effective average energy:
i
A
Q
zH



)(
42
F

(z)
flatness factor
x
3.2.9
Ratio of the effective
average power/energy
density to the maximum
power/energy density at
location z.
flatness factor:
max
)(
E
E
zF



max
)(
H
H
zF



for:
10 

F
43
U

(z)
beam
uniformity
x
3.2.10
Normalized RMS deviation
of power/energy density
from its avg. value at
location z.
beam uniformity for CW-
beams:
beam uniformity for pulsed
beams:
 
dxdyEyxE
A
E
U
i


2
),(
11



