Newport LBP2 Series - Page 93

LBP2 User Guide Document No: 50306-001 Rev G 3/12/2020 Page 93
Note: U

=0 for a flat top beam.
44
U
P
(z)
plateau
uniformity
x
3.2.11
For distributions having a
nearly flat-top profile.
plateau uniformity for CW-
beams
max
)(
E
E
zU
FWHM
p


plateau uniformity for pulsed
beams
max
)(
H
H
zU
FWHM
p


Note: 0 < U
P
(z) < 1; U
P
(z) →0
as distributions become more
flat-topped.
45
s(z)
edge steepness
x
3.2.12
Normalized difference
between effective irradiation
areas of 10% and 90% of
total and power/energy
density values of 10% of
peak.
edge steepness
)(
)()(
)(
1.0
9.01.0
zA
zAzA
zs
i
ii


Note: 0 < s(z) < 1; s(z) →0 as
the edges of the distribution
become more vertical.
46
R
roughness of fit
x
3.3.1
Maximum deviation of the
theoretical fit to the
measure distribution.
roughness of fit:
max
max
E
EE
R
f
ijij


where:
f
ij
E
is the fitted
theoretical distribution.
Note:
10  R
, as
0R
the
fit becomes better.
47
G
goodness of fit
x
3.3.2
Parameter based upon
Kolomogorov-Smirnov
statistical test characterizing
 
dxdyHyxH
A
H
U
i


2
),(
11



