Newport LBP2 Series - Page 95

LBP2 User Guide Document No: 50306-001 Rev G 3/12/2020 Page 95
53
ρ
ij
spot radius
2
3.6
The spot radius is measured
to the location of the first
minimum in the point-
spread function.
for square pinholes:
x
H
ij
d
L 
 
for round pinholes:
p
H
ij
d
L 
 22.1
54
β
max
angular
dynamic range
2
3.7
Maximum usable angular
range of the Hartmann
sensors.
55
w
s,rms
wavefront
statistical
uncertainty
2
3.8
Average uncertainty of
estimating the wavefront
over the entire aperture.
56
w(x,y)
wavefront
shape
1
3.1.1
57
w
c
(x,y)
corrected
wavefront
shape
1
3.4.2