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MX63/MX63L
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Introduction
Configuration of instruction manuals
Read all instruction manuals provided with the units you purchased.
The following instruction manuals are prepared for the units to be used with this product.
Manual names Main contents
Semiconductor / FPD / Industrial
Inspection Microscopes
(this instruction manual)
Reflected brightfield observation, reflected darkfield observation,
reflected differential interference contrast observation, reflected
simple polarization observation, reflected fluorescence observation,
reflected infrared observation, reflected brightfield/darkfield
simultaneous observation, transmitted brightfield observation and
transmitted simple polarization observation
U-RFL-T power supply for mercury burner /
U-RX-T power supply for xenon burner
Connection of the mercury lamp housing with the power supply
TH4 power supply for halogen bulb Connection of the halogen lamp housing with the power supply
Light guide illumination system
Connection of the light guide illumination system with the liquid light
guide, etc.
This microscope employs the UIS2 optical systems. If you use an eyepiece, objective or condenser, etc. together with
this microscope, be sure to use those of UIS2 optical system series.
Using inappropriate units restricts the performance.
(There are other units usable with the UIS series. Contact Olympus or refer to the latest catalogs.)
This instruction manual applies to users of this product and Olympus distributors. However, some part at the end of this
instruction manual applies to Olympus distributors only.
Intended use
This product is designed to observe magnified images of samples for industrial applications.
Appropriate samples include semiconductors, electrical components, molded parts or mechanical parts.
Industrial applications include observation, inspection or measurements.
Do not use this product for any purpose other than its intended use.
Label of immersion oil
Read the label of the immersion oil you purchased.
Immersion oil Main contents
IMMOIL-F30CC Cautions and handling procedures of the immersion oil
SEMI
This device has been subjected to the compliance evaluations of the following guidelines under the
SEMIStandard.
· S2-0715: Safety Guidelines for Semiconductor Manufacturing Equipment
· S8-0915: Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment