27
MX63/MX63L
27
3-5 Placing a sample
1
Placing a sample
The maximum weight loadable on the stage is described below
(including holders).
· MX-SIC8R/MX-SIC6R: 2 kg
· MX-SIC1412R: 3.5 kg
If the sample exceeding the specified weight is placed
on the stage, the feeling of stage movement will be
deteriorated or the stage will be worn out.
Place the sample on the stage plate or the holder plate before
observation.
· If the sample is not flat or parallel, the reflected light does not
return to the objective and you cannot perform the observation.
· If you observe the large-size sample, remove the stage plate
and place the sample on the stage directly.
· When using the wafer holder plate, use the knob
a
to rotate
the wafer holder.
· When using the glass plate, you can observe with the
transmitted light illumination.
1
Rotate the X-axis (horizontal) knob
a
and Y-axis (vertical) knob
b
placed at the lower right of the stage and move the stage.
The stage moves approx. 50 mm in Y-axis (vertical) direction
by one turn of the knob and approx. 37 mm in X-axis
(horizontal) direction by one turn of the knob.
Using the grip clutch
You can move the stage with light force and freely by grabbing this grip
clutch
c
.
· If you do not grab the clutch firmly to the end, the X-axis/
Y-axis knobs may rotate together abruptly to cause the
damage.
· If the excess downward force is applied to the grip, the
stage may be deformed and the stage plates may contact
with each other. Do not apply the excess force to the grip.
When moving the stage, be careful not to allow your fingers,
etc. caught in the aperture
d
of the stage.
Stickiness between clutch and belt for the X/Y axis knobs
If the stage is not moved for a long period, the clutch and the
belt will stick together and the clutch function will not work
smoothly. In this case, hold the X-axis/Y-axis knobs firmly with
hand to prevent them from rotating. And then, grab the grip clutch
completely to the end and move the stage back and forth, left
and right to remove the stickiness.
1
2
Moving the stage
a
d
c
a
b
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