Omron G9SX - Semiconductor Manufacturing Equipment

1. Partial control of machine
G9SX
USER'S GUIDE
15
Application ExamplesSection 1
1-3 Semiconductor Manufacturing Equipment
When the Emergency Stop Switch is pressed, all of the equipment stops.
When the processing section cover is opened, the processing section and conveyor section stop.
When the conveyor section cover is opened, only the conveyor section stops.
Required Units
Unit Qty. Safety input to be applied Page
G9SX-BC 1 Emergency Stop Switch 39
G9SX-AD 2 Safety Door Switches (Set of two) 40
Logical AND
connection
Safety Door
Switch
Safety Door
Switch
Advanced Unit
G9SX-AD
Advanced Unit
G9SX-AD
Segment CSegment B
Basic Unit
G9SX-BC
Logical AND
connection
(1) Emergency Stop
Switch
Segment A
(3) The conveyor section
cover is opened.
(1) The Emergency Stop
Switch is pressed.
(2) The
processing section
cover is opened.
Operation Example
(2) Processing section cover (3) Conveyor section cover
(1) Emergency Stop
Switch
(2) Processing
section cover
(3) Conveyor
section cover
Segment A Segment B Segment C
Stop
Segment A Segment B
Stop Stop
Segment C
Stop
Segment A
Segment B
Stop
Segment C
Stop