6.3 Shutting down the pump
6.3.1 Pumping shutdown
NOTICE
Risk of damaging the pump by generating an electric arc
The pump and its electronic drive unit must not be disconnected from the electrical network before
the rotor completely stops rotating and the unit is isolated from the electrical network: an electric arc
is created when the circuit is interrupted, which damages internal components.
1. Stop the pump from rotating by sending an order to ‘Stop’ on the control interface.
2. Wait for the rotor to completely stop rotating (several minutes).
3. Switch off customer power supply from the equipment.
4. Unplug the mains cable.
Pumping interruption procedure
Initial conditions:
Valves V3 and V4 are connected and controlled via the electronic drive unit.
Valves V1 and V2 are connected and controlled by the equipment.
The vacuum chamber and the pumping lines are under vacuum, the backing pump is on, and the V3
purge valve is open.
1. Close the V2 valve to isolate the pump from the vacuum chamber.
2. Send a pump ‘Stop’ order via the HHR, Remote, serial link, or fieldbus control panel:
–
Pump speed slow down: the green LED flashes at 50% as long as the rotation speed is
> 60 min
-1
, then at 10% when the rotation speed is < 60 min
-1
.
3. Activate the V4 air inlet solenoid valve by sending a ‘Venting’ order via Remote, serial link or
fieldbus control panel.
–
The air inlet solenoid opens when the speed is less than 10000 min
-1
.
4. Close the V1 valve and the backing pump stops.
5. Stop the water-cooling circuit when the pump is stopped (the rotor has stopped rotating).
6. Stop the inert gas purge flow.
NOTICE
Inert gas purge function
When the inert gas purge is stopped, the pumped gases can pass from the fore vacuum side to the
high vacuum side and damage the bearing housings.
►
Maintain the inert gas purge flow as long as the rotor is running to prolong the flushing.
►
The purge maximum pressure must not exceed 1 · 10
3
to 1.5 · 10
3
hPa (absolute).
NOTICE
Air inlet solenoid valve function
The air inlet solenoid valve reduces the braking time required for the pump to get up to the atmos-
pheric pressure. When isolation valves are installed on the pump inlet and exhaust, the rotor slow-
down efficiency is improved.
►
If the pump has been stopped by a sudden air inlet, limit the number of restarts to 2 per hour.
►
if the pump has been stopped without air inlet, the number of restarts are not limited.
►
Please contact us for advice on the air inlet solenoid valve.
Pump stop due to power failure
Stopping the pump by disconnecting the mains power supply is not a normal way to stop
the pump:
●
Always send a ‘Stop’ order via the control panel and wait for the pump to stop rotating
before starting work on the product.
Operation
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