Or-
der
Pa-
ra-
me-
ter
Description Functions
STA none g
0
to g
24
:
warning
and default
bytes
g 0 = ok 1 = warning 2 = fault
0 Power overheat Seized pump, not accelerating
1
2
3
4 Hall sensor
5
6
7 Mag. suspens.
8 Power fail
9
10 Upper radial bearing Yh
11 Upper radial bearing Xh
12 Lower radial bearing Yb
13 Lower radial bearing Xb
14 Axial bearing Z
15 Maintenance
16 Electronic temperature Electronic temperature
17 Pump temperature Pump temperature
18
19
20
21
22
23 Fieldbus communication Pump not connected
24 Internal communication Mag. comm. fail. parameters init.
8.5 Operation via fieldbus
Connecting and using Pfeiffer Vacuum turbomolecular pumps with a fieldbus system is possible when
the corresponding control interface is installed on the pump (depends on the ordering guide).
►
Refer to the operating instructions of the corresponding control interface (see chapter “Applicable
documents”).
Interfaces for control
43/60
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