Rigaku MFM65 - Software Configuration

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ME12058B
Maintenance Section
3.4 Software Configuration
Job Loadport1
Loadport2
Chart
System EFEM
Optics1
Optics2
Optics3
Manual
Sequence Test
MFM Status
Recipes Process Recipe
Analysis Recipe
Wafer Map
Pattern Map
Data Log Equipment Log
Process Log
Alarm
Setup EFEM Settings
Optics Setup
System Setup
Startup Startup/Shutdown
Alarms Alarm
Alarm Log
Accessory off-line analysis software:
1. GXRR: XRR analysis software
2. XTFbatch: XRF processing software
3. XTFcalib: XRF calibration curve software
4. XTFstd: XRF drift correction software
5. XRDbatch: XRD processing software (Option)
Fig. 3-4-1 Software Block Diagram