ME12058B−ii
Maintenance Section
Contents
1. OVERVIEW ..............................................................................................................................................1
2. SAFETY .....................................................................................................................................................2
2.1 Hazards and Risks..............................................................................................................................2
2.2 Hazard Indications .............................................................................................................................5
2.3 Interlock List......................................................................................................................................9
2.4 Lock-out / Tag-out...........................................................................................................................11
2.5 EMO ................................................................................................................................................12
2.6 Maintenance Keys............................................................................................................................12
3. CONFIGURATION ................................................................................................................................13
3.1 MFM65 External Figure ..................................................................................................................13
3.2 MFM65 Configuration Block Diagram ...........................................................................................16
3.3 Functions..........................................................................................................................................17
3.4 Software Configuration....................................................................................................................18
3.5 Hardware Specifications ..................................................................................................................19
3.6 Explanation of Software ..................................................................................................................21
3.7 Utility Specifications .......................................................................................................................22
4. START UP ...............................................................................................................................................26
5. SHUTDOWN ...........................................................................................................................................27
6. DAILY CHECKS ....................................................................................................................................28
7. DAILY ANALYSIS .................................................................................................................................29
8. EDIT RECIPE .........................................................................................................................................30
8.1 Display the Edit Recipe Screen........................................................................................................30
8.2 Edit Recipe.......................................................................................................................................31
8.2.1 Process Recipe ......................................................................................................................32
8.2.2 Analysis recipe......................................................................................................................34
8.2.3 Wafer map recipe ..................................................................................................................40
8.2.4 Pattern map recipe.................................................................................................................42
9. MANUAL OPERATION........................................................................................................................50
9.1 Operation in the Chart Screen..........................................................................................................51
9.2 [EFEM] Control...............................................................................................................................52
9.3 [Optics1] ∼ [Optics3]Control...........................................................................................................54
9.4 [Manual] Control .............................................................................................................................55
9.5 [Sequence Test] Control ..................................................................................................................57
9.6 [MFM Status] Control .....................................................................................................................58
10. SETUP ....................................................................................................................................................59
10.1 EFEM Settings...............................................................................................................................60
10.2 Optics Setup...................................................................................................................................61
11. DATA LOG............................................................................................................................................64
12. ALARMS................................................................................................................................................66
13. ROUTINE CHECKUP LIST ...............................................................................................................67
13.1 Checking cooling water, CDA and vacuum...................................................................................69
13.2 Cleaning of the transport line.........................................................................................................70
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