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ME12058B
Maintenance Section
10.1 EFEM Settings
Click [Carrier], and open the [EFEM Setup] dialog box.
Items Contents
Load Port 1 Carrier
Chooses the type of carriers to use on the load port 1.
Load Port 2 Carrier
Chooses the type of carriers to use on the load port 2.
Use Notch Aligner
Check on the case of using wafer aligner. (Default : Checked)
Fig. 10-1-1 [EFEM Settings] button
Fig. 10-1-2 [EFEM Setup] dialog box
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