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ME12058B
Maintenance Section
15.8 XRF Measurement
Troubles Causes and remedies
Analysis result is abnormal.
Check the selection of the recipe.
The measurement result
(thickness) is not calculated
after the measurement.
The constants of calibration curve are not registered.
Refer to the manual of the XRF analysis software.
The measurement result
(thickness) has no unit and
different digit number.
Enter the unit and the digit number in the XRF analysis
software.
Refer to the manual of the XRF analysis software.
After measuring the standard
sample, the data of the standard
sample cannot be loaded to the
XRF software of creating the
calibration curve.
When measuring the standard sample, enter “_C” strings to
the comment column.
Refer to the manual of the XRF analysis software.
After measuring the
standardization sample, the
data of the standardization
sample cannot be loaded to the
XRF standardization software.
When measuring the standardization sample, enter “_S”
strings to the comment column.
Refer to the manual of the XRF analysis software.
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