Rigaku MFM65 - Wafer Map Recipe

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ME12058B
Maintenance Section
8.2.3 Wafer map recipe
Click [Wafer Map] among the sub-navigation buttons.
Items Contents Notes
New
Create a new recipe. See the following dialog box.
Edit
Edit an existing recipe. See the following dialog box.
Copy
Copy the specified recipe in the table.
Rename
Rename the specified recipe in the table.
Delete
Delete the specified recipe in the table.
When clicking [New] or [Edit] button, the following “Edit Wafer Map” dialog box appears.
Fig. 8-2-7 Wafer Map Button