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ME12058B
Maintenance Section
13.2 Cleaning of the transport line
Wipe as below figure, after opening the right side doors of the EFEM and the main module.
WARNING
Do not use the maintenance key, when cleaning.
Take care to avoid injury from catching your finger in the side doors.
Also, take care to avoid injury from hitting your head against any mechanical
projections.
WARNING Do not touch the SDD.
The beryllium foil is attached to the head of the SDD.
When ethanol, which should be managed in the customer’s FAB, is used for
cleaning, wear gloves.
(Refer to the attached MSDS.)
NOTE:
Use the hand light which is attached to the instrument, if necessary.
The handy light can be used by connecting to a socket, and see chapter 14.2 about the
connection.
Contact Points to the back side of the wafer.
Wipe these points with ethanol or pure water of the
custome
’s FAB.
Fig. 13-2-1 Cleaning Points
Robot Hand Aligner
Inside of cover
Sample Stage
When wiping the
robot hand, wipe this
over the protection
panel in the EFEM.
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