Rigaku MFM65 - Configuration; MFM65 External Figure

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ME12058B
Maintenance Section
3. CONFIGURATION
3.1 MFM65 External Figure
[External Figure]
Si
g
nal Towe
r
EMO
Load Por
t
LCD
Keyboard/Trackball
Power Box
EFEM
Main Module
Load Port
Keyboard/
Trackball
FFU
Maintenance Panel
for Main Module
Maintenance Doo
r
for Main Module
Maintenance Doo
r
for EFEM
FFU
EMO
Power Cable Inlet
Power ON/OFF
Buttons
Main Breake
r
(Inside)
Maintenance
p
anels
EMO
Utility
connections
Front View
Ri
g
ht View
Rear View
To
p
View
Fig. 3-1-1 External Figure
Maintenance Doo
r
for Main Module
EMO
Maintenance Doo
r
for EFEM
Maintenance Panel
for Main Module
Lock-out/Tag-out
Handle
Le
f
t View
UPS for PC
PC