Rigaku MFM65 - Wafer Transfer

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ME12058B
Maintenance Section
15.5 Wafer Transfer
Troubles Causes and remedies
The robot hand cannot perform
the adsorbing function.
If the vacuum pipe is connected to the factory facility, check
the pressure in the vacuum line.
The aligner cannot perform the
adsorbing function.
(Refer to “14.3 Utility Adjustment” for checking inside.)
A wafer is left inside the
equipment.
Click [Unload Wafer] on the main window of the software
to return the wafer to the carrier.
(Refer to “5.3 Sample Unloading in the Event Emergency” in
the operation manual.)
Conduct the startup procedure with the software.
When the wafer is moved to the robot home position, click
[Unload Wafer] on the main window of the software.
(Refer to “5.3 Sample Unloading in the Event Emergency” in
the operation manual.)
The bulkhead gates between the
main equipment module and
EFEM does not open or close.
Check to make sure that CDA is supplied.
Check the pressure of CDA on the facility side.
(Refer to “14.3 Utility Adjustment” for checking inside.)
The alarm of the robot occurs.
Shut down the PC, turn off the main breaker lockout handle
of the equipment, and restart the equipment.
(Refer to “2.4 Lock-out/Tag-out”.)