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ME12058B
Maintenance Section
9. MANUAL OPERATION
This function enables manual operation individually for the setting of measurement conditions, and for
maintenance.
Select [System] among the navigation buttons, and Select each sub-navigation button.
(1) [EFEM] Control
(2) [Optics1] ~ [Optics3] Control
(3) [Manual] Control
(4) [Sequence Test] Control
(5) [MFM Status] Control
Fig. 9-1 Manual Main Window
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