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ME12058B
Maintenance Section
8.2 Edit Recipe
There are four kinds of recipes in this software as below.
(1) Process recipe This recipe is specified and executed in Jobs.
This recipe consists of an existing analysis recipe and an existing map
recipe which is a wafer map recipe or pattern map recipe.
(2) Analysis recipe XRR/XRF/XRD measurement and data process conditions at an
arbitrary point on a wafer.
(3) Wafer map recipe Measurement points on a non-patterned wafer.
A point is specified by the x-y or r-φ coordinates on a wafer.
(4) Pattern map recipe Measurement points on a patterned wafer.
A point is specified by the pattern recognition process.
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