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ME12058B
Maintenance Section
15.2 Startup
Troubles Causes and remedies
The goniometer cannot be
initialized.
Check to make sure that the side doors of the main module or
EFEM are not open. (See “2.3 Interlock List”.)
Check to make sure that the load port panels or rear panels
are not open.
Opening any of these panels or doors turns off the power of
the goniometer. Be sure to close the side doors and panels.
If the cause of the problem is unknown, shut down the PC,
turn off the main breaker lock-out handle of the equipment,
then restart the equipment.
(Refer to “2.4 Lock-out/Tag-out”.)
The sample transfer system
cannot be initialized.
Check to make sure that the side doors of the main module or
EFEM are not open. (See “2.3 Interlock List”.)
Check to make sure that the load port panels or rear panels
are not open.
Opening any of these panels or doors turns off the power of
the sample feed system. Be sure to close the side doors and
panels.
Check to make sure that the manual robot controller (inside
the EFEM) is not set to the manual mode.
Set the manual robot controller to the remote mode ([RMT] is
indicated).
Check to make sure that CDA and vacuum are supplied.
Make sure of utility connections.
(Refer to “14.3 Utility Adjustment” for checking inside.)
If the cause of the problem is unknown, shut down the PC,
turn off the main breaker lockout handle of the equipment,
then restart the equipment.
(Refer to “2.4 Lock-out/Tag-out”.)
The equipment does not
generate X-rays.
Check to make sure that the water chiller is turned on.
If the software screen shows a CW alarm, cooling water may
not be supplied to the X-ray tube.
Turn on the water chiller, and check that cooling water is
circulated properly.
Check to make sure that the side doors of the main module or
EFEM are not open. (See “2.3 Interlock List”.)
Check to make sure that the load port panels or rear panels
are not open.
Opening any of these panels or doors turns off the power of
the sample feed system. Be sure to close the side door and
panels.
Check to make sure that the software screen does not shows a
CW alarm even though the water chiller is operating and
circulating cooling water.
For the CW alarm, adjust the flow rate so that the alarms are
cancelled (refer to the operation manual of the water chiller).
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