Rigaku MFM65 - Pattern Map Recipe

− 42 −
ME12058B
Maintenance Section
8.2.4 Pattern map recipe
Click [Wafer Map] among the sub-navigation buttons.
Items Contents Notes
Edit
Edits a recipe without moving sample stage.
It is available to edit recipes which are saved
already.
See the following dialog box.
Teaching
Edits a recipe with moving sample stage.
It is available to create new recipes.
See the following dialog box.
When clicking [Edit] or [Teaching] button, the following [Patterned Wafer Map] dialog box
appears.
Fig. 8-2-9 Pattern Map Button