Rigaku MFM65 - A2.2 Analysis;Measurement Flow

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ME12058B
Maintenance Section
A2.2 Analysis/Measurement Flow
Measurement of the position
of the reflection beam
Angle alignment
Analysis
result
Save data
A
Open
load port door
Input a job list
Unload wafer
Start analysis
Notch aligner
Move sample stage to the
wafer pickup position
Open lid
Place wafer on the sample stage
1
Close lid
Load
Unload
Press a button
1
Alignment of sample height
Angle alignment
Measurement
Analysis
End map
2
Yes
No
No
Yes
Yes
No
B
Exchange
wafer
Load carrier
Close
load port door
Move to the
measurement point
Analysis condition
has been set
Ready
Blue lamp ON
LOAD READY
Lamp ON
Fig. A2-2-1 Analysis Measurement Flow 1