Rigaku MFM65 - Page 99

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ME12058B
Maintenance Section
2
Move to the wafer
pickup position
Open lid
Unload wafer
Return to the load port
Operator call
Yellow lamp blinks
End
A
B
Yes
No
Load
Unload
Press a button
Open
load port door
Unload carrier
Close
load port door
Analysis for all
samples is complete
Fig. A2-2-2 Analysis Measurement Flow 2