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ME12058B
Maintenance Section
8. EDIT RECIPE
In this equipment, measurement conditions and data analysis conditions can be selected by selecting a
recipe.
This function enables measurement conditions and mapping conditions to be selected and edited.
Use the off-line utility software program “XRR: GXRR software”, “XRF: XRFbatch software” or
“XRD: XRDbatch software”, when creating each data process condition.
(See each software’s manual.)
(1) XRR Measurement Condition
(2) XRF Measurement Condition
(3) XRD Measurement Condition
(4) Wafer Mapping Condition
(5) Pattern Mapping Condition
8.1 Display the Edit Recipe Screen
Click [Recipes] among the navigation buttons.
Fig. 8-1-1 Edit Recipe
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