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ME12058B
Maintenance Section
5. SHUTDOWN
The following are the steps for terminating operation and deactivating the equipment.
Start
End
Unload the wafer and cassette
Deactivate the equipment
(Turn the X-ray off/operation for
deactivation
Cooling the X-ray tube
(for example, 30 min)
Turn off the power and cooling
water
Deactivate the control progra
Initialize the goniometer
Controlled by the
shutdown program
NOTE : Make sure the measured wafer, the wafer or the cassette that is untreated due to the
emergency stop, are not left in the equipment for the next start up.
See the operation manual for details.
Fig. 5-1 Shutdown Flow
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