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ME12058B
Maintenance Section
Items Contents Notes
#1 ~ #4
Enter scan conditions of [Scan Type].
([Start], [End], [Step], [Speed])
[Start] and [End] are relative positions from the
adjustment position.
If dividing scan region, check and enter [#2]
~ [#4].
All [Step] are same
value.
Off angle
Enter 0.0 for XRR measurements.
Analysis
When performing auto analysis of XRD profile,
check this box.
Condition
Specify an existing recipe file by creating XRDbatch
software.
[…] button is
available to specify.
Save
Save the analysis recipe.
NOTE : Click the [Save] button, when editing is completed.
If the dialog box is closed without clicking on this button, the recipe is not changed.
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