ME12058B−iii
Maintenance Section
14. MAINTENANCE ..................................................................................................................................71
14.1 Power Box......................................................................................................................................71
14.2 Using the handy light.....................................................................................................................72
14.3 Utility Adjustment .........................................................................................................................73
14.4 Exchanging Parts ...........................................................................................................................74
14.4.1 Cooling Water .....................................................................................................................74
14.4.2 UPS Battery.........................................................................................................................75
14.4.3 Accessories of PC ...............................................................................................................76
15. TROUBLE SHOOTING.......................................................................................................................77
15.1 Electric Power................................................................................................................................77
15.2 Startup............................................................................................................................................78
15.3 Beam Diagnosis .............................................................................................................................80
15.4 Loadport.........................................................................................................................................81
15.5 Wafer Transfer...............................................................................................................................82
15.6 Sample Alignment .........................................................................................................................83
15.7 XRR/XRD Measurement...............................................................................................................84
15.8 XRF Measurement.........................................................................................................................85
15.9 X-ray Trouble ................................................................................................................................86
APPENDIX 1 ..................................................................................................................................................87
A1.1 Consumables and Maintenance Parts............................................................................................87
A1.2 Disposing the Equipment and parts ..............................................................................................89
APPENDIX 2 ..................................................................................................................................................90
A2.1 Explanation of XRR (X-ray reflectometry method) .....................................................................90
A2.2 Analysis/Measurement Flow.........................................................................................................93
APPENDIX 3 ..................................................................................................................................................95
A3.1 Training for Using Equipment ......................................................................................................95
APPENDIX 4 ..................................................................................................................................................96
A4.1 Power Circuit Diagram .................................................................................................................96
A4.2 EMO Circuit..................................................................................................................................98
APPENDIX 5 ..................................................................................................................................................99
A5.1 List of Material Safety Database Sheet (MSDS) ..........................................................................99
A5.2 MSDS of Beryllium ....................................................................................................................100
A5.3 MSDS of Lead ............................................................................................................................111
A5.4 MSDS of Lithium .......................................................................................................................112
A5.5 MSDS of Mercury.......................................................................................................................115
A5.6 MSDS of Mechanical Lubricating Grease ..................................................................................121
A5.7 MSDS of Ethanol........................................................................................................................128
First Edition: October 19, 2005
Second Edition: March 5, 2008
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