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ME12058B
Maintenance Section
Items Contents Notes
Process Recipe
Enter the name of process recipe.
Generate Name
Analysis Recipe
Choose an analysis recipe in the list box.
Map Recipe
Choose a map recipe in the list box.
Wafer Map
Wafer map recipes are displayed into the list box. (Radio button)
Pattern Map
Pattern map recipes are displayed into the list box. (Radio button)
Save
Save the process recipe.
NOTE : Click the [Save] button, when editing is completed.
If the dialog box is closed without clicking on this button, the recipe is not changed.
Fig. 8-2-2 Create Process Recipe dialog box
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