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ME12058B
Maintenance Section
Items Contents
Load port #
Choose the load port number, 1 or 2, to load/unload a wafer.
Slot #
Choose the slot number, 1 to 25, in the FOUP on the specified load port.
Load
The specified wafer is removed from the FOUP and the aligner sets the notch
position. The wafer is then mounted on the sample stage.
Unload
The wafer on the stage returns to the specified FOUP on the load port.
NOTE :
This is a manual mode and any slot to which the wafer is to be loaded/unloaded may be
selected.
Prior to this control, confirm the cassette size and that the specified slot contains
no wafer.
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