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ME12058B
Maintenance Section
Items Contents
1
Cooling water:
Checking and adjusting
the flow rate of
secondary-water flow
rate
Check the water flow rate meter at the left side of the equipment.
Water flow rate meter reading of about 1.3 – 1.7 L/min.
When adjusting, refer to chapter 13.1.
2
Compressed dry air:
Checking and adjusting
of the pressure of
compressed dry air
Check the pressure meter at the left side of the equipment.
Pressure meter reading of about 0.48 – 0.52 MPa..
When adjusting, refer to chapter 13.1.
3
Vacuum:
Checking and adjusting
the suction pressure of
vacuum
Check the vacuum meter at the left side of the equipment.
Vacuum pressure reading of -75 – -80 kPa.
When adjusting, refer to chapter 13.1.
4
Cleaning of the transport
line
Wipe the robot hand, aligner suction pads and sample stage by the
clean cloth, which soaks up alcohol or pure water.
Prepare clean cloth, alcohol and pure water that are used in the
facility.
When cleaning, refer to chapter 13.2.
5
Exchange of cooling
water and filters
In the chiller (circulated water).
Refer to the manual of the chiller.
6
Exchange of X-ray tubes The X-ray tube must be exchanged by our service personnel in
charge. (See “12.3.1 X-ray tube”.)
7
Check for the operation
of the water leak sensor
Drench the water leak sensor and check the operation of the sensor.
8
Add mechanical grease
When periodic maintenance by our service personnel in charge, the
mechanical grease for the guide rails of actuators should be added.
WARNING:
Contact to the personnel in charge of service.
When disposing, refer to the attached MSDS
of Beryllium.
CAUTION:
Contact to the personnel in charge of service.
Refer to the attached MSDS of the grease.
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