Rigaku MFM65 - Page 96

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ME12058B
Maintenance Section
(2) When reflection occurs only on the surface
10
-5
10
-4
10
-3
10
-2
10
-1
10
0
Reflectivity
6543210
2
θ
/θ
(
de
g
ree
)
(3) When the reflected waves from the surface and interface interfere with each other
'sin
1
2'sin2
θ
θ
n
dd
−
+⋅=∆
θ’
θ
d
10
-4
10
-3
10
-2
10
-1
10
0
Reflectivity
6543210
2
θ/θ
(
de
g
ree
)
⊿
(4) Interpretation of the XRR profile
10
-5
10
-4
10
-3
10
-2
10
-1
10
0
Reflectivity
86420
2θ/ θ (degree)
Attenuation rate of intensity at
large angles
↓

Surface roughness
σ
Attenuation rate of oscillation at
large angles
↓

Roughness
σ
of surface/interface
Interval
∆θ
of oscillation
↓

Film thickness d
Amplitude of oscillation
↓
Density contrast
Critical angle
θ
c

↓
Density
ρ
Density
ρ
1
Density
ρ
2
Density
ρ
3
Film thickness d1
Film thickness d2
Roughness
σ
1
Roughness
σ
2
Roughness
σ
3
Fig. A2-1-3 Surface Reflection
Fig. A2-1-4 Thickness Oscillation
Fig. A2-1-5 XRR Profile