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Model 880 DEPOSITION CONTROLLER
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SECTION 3.XX
e page 111 of 275 ^
Averaging with Multiple Active Crystal Sensors and Averaging For Multi Layer Depositions
This adds another level of complexity to the serial multi sensor description above. Instead of a
single sensor being active, the map parameter CH x START MODE defines 2 or more channels as active,
the MIN START XTALS parameter reflects this same number or less but at least 2, the MIN ACTIVE
XTALS =< MIN START XTALS (BACKUP channels are optional). By selecting more than 1 active
sensor channel, averaging is automatically assumed. Multi layer would use, as previously described,
separate film/map combinations for each layer except in this case, more than 1 channel is active for each of
the multiple layers. The intent here is toward increased accuracy in a multiple layer material deposition.
The following parameters are described in greater detail in sections 3.5 and 3.15.
Related Conf. Parameters: Need Source/Sensor Card 1 OFF/ON
Need Source/Sensor Card 2 OFF/ON
Need Source/Sensor Card 3 OFF/ON
Need Source/Sensor Card 4 OFF/ON
Related Film Parameters: FILM Fail Mode TIME POWER, ABORT IF FAIL
Control Loop Qual Limits 0 to 9
XTAL Stability S (Limits) 0 to 9
XTAL Life Bounds 0.0-100.0%
Source Sensor MAP SELECT 1 - 30
Related Map Parameters: Master Tooling Value 10.0% - 400.0%
Minimum Start Xtal Channels 1 – 8 minimum channels
Minimum Backup Xtal Channels 0 – 7 minimum channels
Minumum Active Xtal Channels 1 – 8 minimum channels
Xtal Channel Drop Filter* NONE, BALANCE
[dropped Xtal ch Failure]
Channel x Start Mode OFF, ACTIVE, STANDBY
Channel x Fail Action Mode NONE, ABORT FILM
Channel x Backup List X – XXXXXXXX (1 item list to 8 item list),
[where X = 1 to 8 (in each position w/o
redundancies, list extends to 0-8 for a 1 item
list)]
Channel x Tooling Value 10.0% - 400.0%
Channel x Weight 10.0% - 400.0%
*averaging only
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