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Model 880 DEPOSITION CONTROLLER
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SECTION 4.XX
e page 141 of 275 ^
[for optimum noise immunity, it is recommended that a shielded, twisted pair cable be used to make the connection
from the Model 880 to the power supply control input or strip chart recoder of the deposition system]
Control Signal 1 Pin No.
+Output 9
-Output 4
Analog Ground (common) 5
Shield SHLD
Connector Type – 9 PIN D-SUBMINIATURE female
Control Signal 2 Pin No.
+Output 2
-Output 6
Analog Ground (common) 1
Shield SHLD
Connector Type -- 9 PIN D-SUBMINIATURE (ON THE SAME CONNECTOR DESCRIBED ABOVE)
Analog Recorder Output Connection/Usage
As previously discussed, the analog outputs are identical and interchangeable. One output per
Model 880 may be used for a strip chart recorder regardless of the number of sensor cards enabled. A
standard unit having one sensor card may use the second channel for strip chart recording as discussed
here. In this example, the second output provides an analog output voltage proportional to either displayed
rate, rate deviation, power, or thickness. The channel and status value are selected using the system
configuration menu. The names of the related system configuration menu items are recorder function,
recorder output channel and need SS card.
The second analog output, here described for possible use as the analog recorder output voltage,
has the connections as described above for Control Signal 2, that is pins 2, 6, 1 and shield. It is
recommended that a shielded, twisted pair cable be used to make the connection from the Model 880 to the
chart recorder input.
Analog Recorder Output Specifications (any analog output)
Resolution 12 Bits
Accuracy 0.3 % Fs
Loading Capacity 5 mA
Full Scale Output 10 Volts
Analog Recorder Output Calibration / Interpretation
Recorder Output Types
Thickness Mode
- The analog recorder output in the thickness mode is always scaled for plus or
minus 999 angstroms full-scale (9.99V). Resolution is always one (1) angstrom. Display readings above
999 angstroms will be sent to the recorder output as the remainder of the displayed value divided by 1000.
SECTION 4.7
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